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发明名称
DEFLECTION AMPLIFYING CIRCUIT OF ELECTRON BEAM EXPOSURE DEVICE
摘要
申请公布号
JPH0240850(A)
申请公布日期
1990.02.09
申请号
JP19880190077
申请日期
1988.07.29
申请人
TOSHIBA CORP
发明人
KUSAKABE HIDEO
分类号
H01J37/248;H01J37/147;H01J37/305
主分类号
H01J37/248
代理机构
代理人
主权项
地址
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