EINRICHTUNG ZUR POSITIONIERUNG EINES OBJEKTES

摘要

The device comprises an object stage (1) mounted in pendulum supports (2), which stage is coupled to at least one non-laterally-stable resilient slide rod (3), in a desired horizontal co-ordinate direction. The ends of the slide rods remote from the object stage (1) each clamped in an element (7) which is movable perpendicularly to the required coordinate direction, wherein respective coupling points (6, 11) of each slide rod (3) to the object stage and to the movable element (7), are offset in a direction perpendicular to the positioning co-ordinate direction. The movable element (7) is a part of a spring parallelogram (4), the spring elements (4) of which are disposed parallel to the respective co-ordinate direction, and further having a fixed bearing (5) disposed close to the respective coupling point (6) of the slide rod. The movable element itself is coupled to a drive element (8). <IMAGE>