| 摘要 |
PURPOSE:To put an automatic inspection system to practial use by projecting light on a reticle, photodetecting its transmitted light by a photoelectric converting element and obtaining the photoelectric conversion output of the reticle pattern, and comparing its binary-coded output with digital data. CONSTITUTION:The pattern of the reticle 10 is filed in a memory 20 while converted into binary data so that the glass (transparent) part is 1 and the chromium (opaque) part is 0. then the reticle 10 is set and irradiated with the light, whose transmitted light is guided to a pinhole detector 31 on a stage 20 by an optical system 32. The detector 31 is moved in an (x)- and a (y)- direction by a stage 30 to generate the (x)- and (y)-directional scanning outputs of the reticle 10. Therefore, when no dust sticks on the reticle 10, the output of the detector 31 is equal to the pattern data on the reticle 10 which is stored in the memory 20, but if dust sticks, the output is not equal to the pattern data. Consequently, whether dust sticks or not is known. |
