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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0228320(A)
申请公布日期
1990.01.30
申请号
JP19890087280
申请日期
1989.04.06
申请人
FUJITSU LTD
发明人
ABE YASUNARI
分类号
H01L23/522;H01L21/28;H01L21/768
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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