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发明名称
METHOD AND APPARATUS FOR ETCHING COMPOUND SEMICONDUCTOR
摘要
申请公布号
JPH0227724(A)
申请公布日期
1990.01.30
申请号
JP19880177101
申请日期
1988.07.18
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
OSHIMA MASAAKI;HIRAYAMA NORIYUKI
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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