| 摘要 |
PURPOSE:To form a metallic thin film having a uniform composition distribution in the cross direction by using a crucible provided with an opening having a longitudinal axis in the cross direction of a substrate and plural high-vapor- pressure component supply port in the longitudinal direction of the opening at the time of vacuum-depositing a thin film of an alloy of the metals having different vapor pressures on the long-sized and wide substrate. CONSTITUTION:The long-sized and wide polymeric film substrate 11 is traveled along the periphery of a rotating cylindrical can 12, and a Co-Cr alloy 15 in a crucible 14 is melted and vaporized by an electron beam 16 to form an alloy thin film on the substrate 11. At this time, the crucible 14 has a slender opening in the cross direction of the substrate 11, plural high-vapor-pressure component supply ports 18 are provided in the longitudinal direction, high-vapor-pressure Cr grains 20 are supplied from a feeder 17, the crucible is widened by the width W in the vicinity of the supply port 18, and a shield plate 19 is provided. By this method, the composition distribution of the Co-Cr alloy thin film to be formed on the substrate 11 is uniformized, and bumping is controlled. |
