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发明名称
CHARGED PARTICLE BEAM DEVICE
摘要
申请公布号
JPH0218852(A)
申请公布日期
1990.01.23
申请号
JP19880169625
申请日期
1988.07.06
申请人
JEOL LTD
发明人
SAWARAGI HIROSHI
分类号
H01J37/248;H01J37/317
主分类号
H01J37/248
代理机构
代理人
主权项
地址
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