Test circuit for measuring specific contact resistivity of self-aligned contacts in integrated circuits,申请号US19880224512-传众专利搜索

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发明名称	Test circuit for measuring specific contact resistivity of self-aligned contacts in integrated circuits
摘要
申请公布号	US4896108(A)	申请公布日期	1990.01.23
申请号	US19880224512	申请日期	1988.07.25
申请人	AMERICAN TELEPHONE AND TELEGRAPH COMPANY, AT&T BELL LABORATORIES	发明人	LYNCH, WILLIAM T.;NG, KWOK K.
分类号	G01R31/26;G01R27/14;G01R31/27;H01L21/28;H01L21/66;H01L23/544	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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