发明名称 MANUFACTURE OF THIN FILM MAGNETIC HEAD
摘要 PURPOSE:To cause the value of a gap length to be constant and to attain manufacture with satisfactory reproductivity by measuring the thickness of a gap layer before filming an upper magnetic substance layer and executing the filming with overlapping a gap control layer, which has thickness to correspond to a measured value, on the gap layer. CONSTITUTION:A lower magnetic substance layer 2, which is composed of a magnetic substance, is formed on a substrate 1 and next, a gap layer 3 to be composed of an insulator is successively filmed and formed. Here, a lowest layer 5a of an insulator layer 5 to surround a coil 4 is filmed and a first conductor layer 4a of the coil 4 is filmed. Further, a second insulator layer 5b, a second conductor layer 4b and a third insulator layer 5c are successively filmed and formed. The thickness of this gap layer 3 is measured and difference between this measured value and target gap thickness is calculated. Then, the filming is executed so as to be the same thickness as the target gap thickness and a gap control layer 6 is obtained. Next, an upper magnetic substance layer 7 is filmed and formed on this gap control layer 6 and a prescribed protecting layer is formed on the layer 7. After that, the substrate 1 is cut in a prescribed position and a cutting surface is ground. Then, a gap surface to slide and contact to a magnetic medium is formed. Then, the magnetic head of high recording and reproducing function can be stably manufactured.
申请公布号 JPH0218707(A) 申请公布日期 1990.01.23
申请号 JP19880167356 申请日期 1988.07.05
申请人 ALPS ELECTRIC CO LTD 发明人 NAKAJIMA HIROMI
分类号 G11B5/31 主分类号 G11B5/31
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