发明名称 |
MESFET with alpha particle protection |
摘要 |
An integrated circuit includes a semi-insulating semiconductor substrate; a first conductivity type high dopant concentration buried layer produced in the semi-insulating substrate; second conductivity type high dopant concentration drain and source regions produced at the surface of the semi-insulating substrate; a gate electrode produced on the surface of the semi-insulating substrate at a position between the drain and source regions; a second conductivity type channel layer produced between the drain and source regions; and a first conductivity type low dopant concentration region produced only below the second conductivity type channel layer between the second conductivity type drain and source regions in the first conductivity type high dopant concentration region; the drain and source regions being completely surrounded by the first conductivity type high dopant concentration buried layer from the bottom and outer side surfaces thereof. Alternatively, a first conductivity type high dopant concentration buried layer is provided only below and at outer side surfaces of the drain layer and a first conductivity type low dopant concentration buried layer is provided below the channel layer and the source region and at the outer side surface of the source region.
|
申请公布号 |
US4894692(A) |
申请公布日期 |
1990.01.16 |
申请号 |
US19880203295 |
申请日期 |
1988.06.02 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
NODA, MINORU;TANINO, NORIYUKI |
分类号 |
H01L21/761;H01L21/338;H01L27/06;H01L29/10;H01L29/812 |
主分类号 |
H01L21/761 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|