DETECTOR FOR SURFACE POTENTIAL DISTRIBUTION

摘要

PURPOSE:To detect a surface potential of an object to be inspected at a high sensitivity by using a detection head wherein a transparent electrode, optical modulation material layer member and a reflector are laminated. CONSTITUTION:A laser luminous flux transmitted through a beam splitter 4 is made incident into a detection head RA and passes through a transparent electrode Et and an optical modulation material layer member PML to be reflected with a reflector MM made of conducting material. Then, it passes through the member PML again and emitted from the electrode Et to be turned to light changing corresponding to a potential distribution of a charged image in an object O to be inspected. Then, outgoing light from the head RA is reflected with a splitter 4 to be incident into an analyzer 6 after transmitted through a wavelength plate 5 for adjusting quantity of light. An output light of the analyzer 6 is outputted through a photoelectric converter 7.