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发明名称
ION IMPLANTATION
摘要
申请公布号
JPH025347(A)
申请公布日期
1990.01.10
申请号
JP19880147869
申请日期
1988.06.15
申请人
TERU BARIAN KK
发明人
AMIKURA MANABU
分类号
H01J37/147;H01J37/317;H01L21/265
主分类号
H01J37/147
代理机构
代理人
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地址
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