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发明名称
LSI TESTING METHOD
摘要
申请公布号
JPH026774(A)
申请公布日期
1990.01.10
申请号
JP19880156581
申请日期
1988.06.24
申请人
FUJITSU LTD;FUJITSU TOHOKU TSUSHIN SYST KK
发明人
SUENAGA FUMIHIRO;YAMAMOTO SHOJI
分类号
G01R31/28;H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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