| 摘要 |
PURPOSE:To prevent pollution of underground water by adding one of chlorofluorohydrocarbons composed of 3 carbon atoms as an effective component. CONSTITUTION:One of the chlorofluorohydrocarbons composed of 3 carbon atoms is contained as an effective component in the developer. It is preferred to use the H-containing chlorofluorohydrocarbon, such as 1,1-dichloro-2,2,3,3,3- pentafluorohydrocarbon (b.p. 45.5 deg.C), or a mixture of plural kinds of such hydrocarbons. At least one of hydrocarbons, alcohols, ketones, chlorinated hydrocarbons, aromatic hydrocarbons, and esters is contained in the resist peeling agent, thus permitting the favorable resist peeling agent to be obtained in place of the ones unfavorable from the viewpoint of polluting the underground water. |
