发明名称 SYNCHROTRON RADIATION IRRADIATING EQUIPMENT
摘要 PURPOSE:To ensure 100% safety and make it possible to raise production efficiency by providing a radiation shield containing a synchrotron radiation source, beam lines and an irradiating equipment. CONSTITUTION:A synchrotron radiation 2 radiated from a storage ring 1 which is the synchrotron radiation light source is introduced to an irradiating equipment 4 through many beam lines which are connected to the storage ring 1. A radiation shield 6 is disposed in such a manner as to surround the storage ring 1, the beam lines 3 and the equipment 4. When work is done by using synchrotron radiation light equipment constructed as mentioned above, there is no possibility that the worker is exposed to X- and gamma-rays. A synchrotron radiation irradiating equipment capable of keeping production arrangements efficient at all times can be obtained.
申请公布号 JPH022108(A) 申请公布日期 1990.01.08
申请号 JP19880145915 申请日期 1988.06.15
申请人 NEC CORP 发明人 OKADA KOICHI
分类号 G21F3/00;G21K5/00;H01L21/027;H01L21/30;H05H13/04 主分类号 G21F3/00
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