| 摘要 |
PURPOSE:To improve responsibility and a positioning accuracy by fitting an intermediate saddle in an X axial direction to a base and a table main body in a Y axial direction to the intermediate saddle freely slidably via a linear bearing respectively and driving by a linear motor. CONSTITUTION:An intermediate saddle 2 is fitted to a base 1 in an X axial direction and a table main body 3 to the intermediate saddle 2 in a Y axial direction freely slidably via a linear bearing 5 respectively. Plural stators 9 of linear motors are arranged in parallel so that the phase of the respective fixed tooth may be slided on either one part of the upper face of the base 1 or the lower face of the intermediate saddle 2 and either one part of the upper face of the intermediate saddle 2 or the lower face of the table main body 3 and also plural needles 8 of the linear motors corresponding to the stator 9 are provided in parallel at the respective other parts. The responsibility of the actuation/stopping time is improved by lightening an XY table, a fine adjustment and quick feeding are enabled and positioning accuracy can be increased. |
