| 摘要 |
PURPOSE:To use a low-accuracy component and to simplify an assembly process by connecting a discharge tube, a blower and a beat exchanger by using a flexible pipe. CONSTITUTION:Electrodes 40a to 43b composed of a metal film are installed on an outer wall of a discharge tube 1 composed of a cylinder of a dielectric; when a high-frequency voltage is applied to the individual electrodes from high-frequency power supplies 50 to 53, a laser gas is excited inside the discharge tube 1; laser beams 6, 7 are generated inside and outside a resonator constituted of an output coupling mirror 2 and a total reflector 3. The laser gas is circulated in directions of arrows by means of a Roots blower 9 and is cooled with heat exchangers 8, 10. The discharge tube 1, the blower 9 and the heat exchangers 8, 10 are connected by using flexible pipes 110 to 114. By this setup, even a low-accuracy component can be used and an assembly process can be simplified. |
