摘要 |
PURPOSE:To easily adjust impedance over a wide range by providing a series circuit comprising a bent conductive layer and a lumped constant capacitive element connected to a transmission line and a line length changing means changing the line length of the bent conductive layer. CONSTITUTION:An impedance adjustment circuit 6 is provided on an output side matching circuit 4 to adjust the impedance. A series circuit comprising a bent conductive layer 7 and a chip capacitor 12 as a lumped constant capacitive element is connected between a transmission line 4a of the output side matching circuit 4 and a ground conductive layer, and island-shaped conductive layers 8-11 are arranged in the vicinity of the bent conductive layer 7 and U or L-shaped short-circuit lines a-g are used to short-circuit selectively parts of the bent conductive layer 7 or parts between the bent conductive layer 7 and the island-shaped conductive layers 8-11 to vary the line length of the bent conductive layer 7, thereby adjusting the impedance of the series circuit comprising the bent conductive layer 7 and the chip capacitor 12 over a wide range in a way of showing inductive component (L component) - series resonance - capacitive component, and thereby adjusting the impedance of the entire output side matching circuit 4 over a wide range. |