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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH01283858(A)
申请公布日期
1989.11.15
申请号
JP19880113143
申请日期
1988.05.10
申请人
MATSUSHITA ELECTRON CORP
发明人
KAWAI MASANOBU
分类号
H01L23/52;H01L21/3205;H01L27/00
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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