BOAT FOR EPITAXIAL GROWING OF SEMICONDUCTOR

摘要

The equipment is a boat for epitaxical growing of compound semiconductors used as photo semiconductors such as a laser diode and a photo diode. The graphite boat comprises a support plate (1) which have the boat move and at which a thermocouple is loaded, a plate (2) having a recess in order to adjust the gradient and the height of the support plate, a slider (6) where a slot (7) is formed at one end and a quartz rod (18) is inserted and slided, a compound vessel (9) whose opening part is of about the same size as the slot, a well (15) where gallium and compound powder is put, and a gallium vessel (13) which has a hole for hanging the quartz rod.