发明名称 PRODUCTION OF MAGNETIC DISK
摘要 PURPOSE:To form desired ruggedness with good reproducibility and to prevent the attraction of a magnetic head slider and a magnetic disk by forming protective hard carbon films to an island shape by a vapor growth method on a magnetic film to provide projecting parts on the disk surface and to roughen the surface. CONSTITUTION:A hard film 1b is formed on a base material 1a to produce a substrate 1 and the magnetic film 2 for recording and reproducing is formed thereon. The protective hard carbon films 3 are formed to the island shape and the magnetic disk having the good surface roughness is obtd. when the protective hard carbon film is formed at 2,000Angstrom at <=1% concn. of hydrocarbon, for example, at <=0.5% in this case. The magnetic disk having the desired surface roughness is formed with good reproducibility and the attraction of the magnetic head slider is prevented by adjusting the film forming conditions for the protective hard carbon film. Since the substrate is not subjected to texturing, the magnetic film 2 has no ruggedness and since the fluctuation in the spacing loss does not arise, the stable reproduced output is obtd.
申请公布号 JPH01273219(A) 申请公布日期 1989.11.01
申请号 JP19880101669 申请日期 1988.04.25
申请人 MITSUBISHI ELECTRIC CORP 发明人 KUMAGAI MUNEHITO
分类号 C01B31/04;C23C16/26;C23C16/27;G11B5/72;G11B5/84 主分类号 C01B31/04
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