DEVICE CONTAINING SUBSTRATE SUPPORT TYPE LIGHT WAVEGUIDE

摘要

PURPOSE: To make it possible to form low-loss optical waveguides suitable for parallel coupling by making it possible for a desirable core profile to be smoothly shifted between cores and a first clad layer by the inclusion of a core and clad spread bonding layer. CONSTITUTION: This device has a first waveguide clad layer 21 on a substrate 11, the waveguide cores 12 and 13 on the layer 21, the spread bonding layer 22 and a second clad layer 23. A layer of waveguide core glass is deposited by evaporation on the first clad layer 21 and a photolithographic resist layer is deposited by evaporation on the core glass. The resist layer is patterned in order to form the non-coating part of the core glass to be removed. The non-coated core glass is removed and the core and clad spread bonding layer 22 is applied and is heated to smooth the surface of the waveguide and to round the section. The second clad layer 23 is deposited by evaporation. As a result, the waveguides are constituted to the parallel relation in proximate to each other adequate for bonding of the flanks (evanescent regions) between the waveguides.