| 摘要 |
PURPOSE:To accurately check cleanliness of equipment and manufacture stable semiconductor devices by a method wherein dry air cleaned by an air filter is blown to a part to be measured so as to blow up particles deposited on the semiconductor manufacturing equipment and blown up particles are sampled and measured. CONSTITUTION:An aerodynamic focus nozzle 8 is double-structured whereby clean air cleaned by an air filter 3 is flowing in the outer nozzle and sample air is flowing in the inner nozzle. Inside of a detection cell 11 is not therefore contaminated, and air which has passed is discharged by a suction nozzle 9 and circulated after it is passed through a reservoir 12 and a pump 13 and filtered by the air filter 3. Particles in sample air passing through the detection cell 11 generate light scattering by a He-Ne laser 10 inside an active cavity. When this scattering is detected by the side-way scattering method in the detection cell 11, diameters of particles and the number of particles in sample air are counted by a particle measuring unit 1 so that cleanliness in a vacuum system of the semiconductor manufacturing equipment can be controlled. |
