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发明名称
METHOD FOR PURIFYING NITROGEN TRIFLUORIDE GAS
摘要
申请公布号
JPH01261209(A)
申请公布日期
1989.10.18
申请号
JP19880089256
申请日期
1988.04.13
申请人
MITSUI TOATSU CHEM INC
发明人
NISHITSUJI TOSHIHIKO;IWANAGA TOKUYUKI;KOTO NOBUHIKO
分类号
C01B21/083
主分类号
C01B21/083
代理机构
代理人
主权项
地址
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