Alloy layer and metallurgy structure for establishing electrical contact.
摘要
<p>An alloy layer (12) contacting portions of a conductive interconnect layer (2) exposed through an overlaying organic insulating layer (4) having apertures therethrough. The alloy contains chromium and titanium, and is formed such that at least 50 atom % of the total content of the alloy is titanium at the alloy-insulating layer interface (6).</p>
申请公布号
EP0337064(A2)
申请公布日期
1989.10.18
申请号
EP19890102181
申请日期
1989.02.09
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
GARDNER, DAVID ALAN;RYAN, JAMES GARDNER;SCHAEFER, JOSEPH GEORGE;WALTON, ERICK GREGORY