DRY ETCHING PROCESS,申请号JP19880076085-传众专利搜索

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发明名称	DRY ETCHING PROCESS
摘要
申请公布号	JPH01251617(A)	申请公布日期	1989.10.06
申请号	JP19880076085	申请日期	1988.03.31
申请人	TOSHIBA CORP	发明人	MURAGUCHI TOSHIYA;OKANO HARUO;ARIKADO TSUNETOSHI
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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