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发明名称
MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH01248563(A)
申请公布日期
1989.10.04
申请号
JP19880077113
申请日期
1988.03.29
申请人
NEC CORP
发明人
MIHARA SEIICHIRO
分类号
H01L29/78;H01L21/265;H01L21/336
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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