| 摘要 |
PURPOSE:To largely improve a cooling effect by allowing the whole front side of main face of a silicon substrate to adhere to a supporting base, and providing the front side of the main face having a heating infrared ray detector so as to be able to adhere to the base. CONSTITUTION:An infrared ray detector 13 and a plurality of conductor layers 14 are provided on the front side main face 12 of a silicon substrate 11. Part of a conductor layer 14 externally protrudes from the substrate 1. The main face 12 of the substrate 11 is secured to a supporting base 16 through an adhesive layer 15. A plurality of electrodes 17 are provided on the base 16. The rear side of the protruding part of the layer 14 from the substrate 11 is wire bonded to the electrodes 17 to be electrically connected. Further, the electrodes 17 are electrically connected to an exterior. An infrared ray is incident to the rear side main face 18 of the detector.
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