| 摘要 |
PURPOSE:To improve the resolution of sample detection and to accurately measure the intensity distribution by converging scattered light which is passed through a sample by a photodetection lens and forming an image on an image element, and performing comparative arithmetic as to the photodetection position and photodetection intensity. CONSTITUTION:The light beam 11 from a laser 1 becomes a parallel light beam 13 with width through cylindrical lenses 2 and 3, and this parallel light beam crosses a sample surface 4 and is scattered by samples A and B. Scattered light beams 201 and 202 are converged by a stop 5 and a converging lens 6 to form its image on the image element 9. Here, light which is scattered in fine-angle directions around the optical axis and an unscattered light component are converged by the converging lens 6 and cut off by a shield plate 7 provided at the focus position. Then the scattered light which forms the image on the element 9 indicates the intensity distribution corresponding to the kind of the samples and a density distribution. Consequently, the resolution of the sample detection is improved and the intensity distribution is accurately measured. |
