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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01238121(A)
申请公布日期
1989.09.22
申请号
JP19880066141
申请日期
1988.03.18
申请人
HITACHI LTD
发明人
KOJIMA MASAYUKI;KOIKE ATSUYOSHI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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