Charged particle beam apparatus.

摘要

A superconductive screening is provided around, for example, the specimen chamber or optical spaces to be considered therefor in a charged particle beam apparatus for screening from external or internal stray magnetic fields or magnetic inhomogeneities. By constructing the said screenings from a ceramic superconductive material with terminal seals having only a small aperture for the passage of a particle beam, a mutual influencing of the optical elements can also be strongly reduced.