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发明名称
FASTENER FOR SEMICONDUCTOR WAFER
摘要
申请公布号
JPH01231344(A)
申请公布日期
1989.09.14
申请号
JP19880057700
申请日期
1988.03.11
申请人
TOSHIBA CORP
发明人
SAKOTA TAKAMI;MARUYAMA JUNICHIRO;KANAZAWA MAMORU
分类号
H01L21/683;H01L21/68
主分类号
H01L21/683
代理机构
代理人
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