| 摘要 |
<p>PURPOSE:To improve the adhesive strength of a Cr film and a glass substrate and to surely and stably form Cr patterns so as to improve the yield of the above display body by limiting the content of BaO which is the compsn. of the substrate to <=10wt.%. CONSTITUTION:This display body is formed by using an MIM element consisting of the structure of Ta-TaOx-Cr on the insulating substrate, controlling the voltage to be impressed to a liquid crystal layer and executing dry etching using a gaseous mixture composed of freon and oxygen. The insulating substrate contains <=10wt.% barium oxide (BaO) in this case. The margin to overetching of the glass substrate is thereby widened and the adhesive strength of the film to be formed thereon is improved. The sure and stable patterns are thus formed and the yield is improved.</p> |
