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发明名称
BOAT CONVEYING METHOD IN LIQUID PHASE EPITAXIAL GROWTH APPARATUS
摘要
申请公布号
JPH01230494(A)
申请公布日期
1989.09.13
申请号
JP19880055731
申请日期
1988.03.09
申请人
TEL SAGAMI LTD
发明人
MORITA YOICHI;TOKI MICHIO
分类号
H01L21/208;C30B19/00
主分类号
H01L21/208
代理机构
代理人
主权项
地址
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