发明名称 WIRING CONSTRUCTION OF MONOLITHIC MICROWAVE INTEGRATED CIRCUIT
摘要 PURPOSE:To prevent the crossing part of a wiring connecting between grounding conductors and a signal line from giving influence upon the radio frequency characteristics by a method wherein the width of the signal line at the intercross is narrower than the width at another part. CONSTITUTION:The width Wb of a signal line 1 is narrowed at the intercross of the signal line 1 and an air bridge 3 so as to prevent the characteristic impedance of a transmission line from being changed at the intercross and to keep it constant as a whole. A dielectric, for instance an Si3N4 or SiO2 film, may be provided between the signal line 1 and the wiring connecting between grounding conductors 2. Further, the width Wa of the signal line 1 may be gradually changed to form tapered parts between the air bridge 3 part where the width is Wb and the other parts.
申请公布号 JPH01223752(A) 申请公布日期 1989.09.06
申请号 JP19880048822 申请日期 1988.03.02
申请人 MITSUBISHI ELECTRIC CORP 发明人 KOMARU MAKIO
分类号 H01L23/522;H01L21/768;H01L21/822;H01L27/04;H01P3/02 主分类号 H01L23/522
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