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发明名称
EINRICHTUNG ZUR PLASMABEHANDLUNG UND/ODER BESCHICHTUNG FESTER TEILCHEN UND FORMKOERPER
摘要
申请公布号
DD271462(A1)
申请公布日期
1989.09.06
申请号
DD19880315078
申请日期
1988.04.26
申请人
AKADEMIE DER WISSENSCHAFTEN DER DDR,DD
发明人
ENDLER,INGOLF,DD;RISSE,GUNTER,DD;WELTSCH,PAUL,DD;SCHAFFER,FRANK,DD;GERLACH,DIETER,DD
分类号
B01J19/08;(IPC1-7):B01J19/08
主分类号
B01J19/08
代理机构
代理人
主权项
地址
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