| 摘要 |
<p>PURPOSE:To improve a response speed by forming a thin film by involving an alkali metal to tin oxide and increasing a change in impedance due to water adsorption. CONSTITUTION:A thin film is formed with tin oxide involving alkali metal. Thickness of the thin film is of 0.02-5mum. The alkali metal is of at least one kind selected among lithium, sodium, and potassium. The content of the alkali metal is 0.1-500mol% with respect to tin. Here, once water is adsorbed on a tin oxide thin film containing the alkali metal, a water molecule is partly dissociated to release a proton. Since the amount of adsorption of water molecule changes in response to a change in relative humidity, proton concentration also changes in response thereto, producing an enough impedance change depending on the change in the relative humidity. Hereby, a response speed is improved.</p> |
