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发明名称
FORMATION OF ELEMENT ISOLATION REGION
摘要
申请公布号
JPH01215037(A)
申请公布日期
1989.08.29
申请号
JP19880041706
申请日期
1988.02.23
申请人
SHARP CORP
发明人
URAI MASAHIKO;IGUCHI KATSUJI;SHIGA CHIYAKO
分类号
H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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