APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE,申请号JP19880039840-传众专利搜索

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发明名称	APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH01214019(A)	申请公布日期	1989.08.28
申请号	JP19880039840	申请日期	1988.02.22
申请人	NEC CORP	发明人	TSURUTA HIROKI
分类号	H01J37/317;H01L21/265	主分类号	H01J37/317
代理机构		代理人
主权项
地址

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