发明名称 MULTILAYER THICK FILM HYBRID INTEGRATED CIRCUIT SUBSTRATE
摘要 PURPOSE:To prevent the generation of cracks in a polyimide insulating layer, and the generation of exfoliation between a metal substrate and the polyimide insulating layer due to thermal distortion, by constituting a circuit substrate by interposing a mediation layer containing copper fine-grain component between the metal substrate and the polyimide insulating layer. CONSTITUTION:On a metal substrate 1, an interfacial layer 6 in which copper fine-grain is contained in polyimide is uniformly printed and hardened with a size larger than or equal to the pattern of an insulating layer 2'. Thereon, a multilayer printed interconnection composed of a polyimide insulating layer 2', a conductor layer 3' and via holes 4' is formed. As a result, the polyimide insulating layer 2' is bonded to the mediation layer 6 via the same polyimide. Thermal distortion due to the difference of expansion is reduced by the effect of expansion of copper fine-grain abundant in expandability. By the network effect of dispersed copper fine-grain as inter-resinous substance, stress concentration is reduced, and cracks and exfoliation of the polyimide insulating layer 2' can be prevented.
申请公布号 JPH01211991(A) 申请公布日期 1989.08.25
申请号 JP19880036319 申请日期 1988.02.18
申请人 JAPAN RADIO CO LTD 发明人 OIWA TAKAO
分类号 H05K1/05 主分类号 H05K1/05
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