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发明名称
MAGNETRON CATHODE
摘要
申请公布号
JPH01212760(A)
申请公布日期
1989.08.25
申请号
JP19880036690
申请日期
1988.02.19
申请人
SEIKO EPSON CORP
发明人
SUGIMOTO MAMORU
分类号
C23C14/36;C23C14/35
主分类号
C23C14/36
代理机构
代理人
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地址
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