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经营范围
发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH01208458(A)
申请公布日期
1989.08.22
申请号
JP19880030964
申请日期
1988.02.15
申请人
HITACHI LTD
发明人
KAMEI MITSUHIRO;SETOYAMA HIDETSUGU;HAYASHI MASAYUKI
分类号
C23C14/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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