发明名称 SOLUTION COATER AND PELLET BONDING DEVICE USING THE SAME
摘要 PURPOSE:To coat an object uniformly with a solution by mounting a porous body to a discharge opening for the solution and coating the object with the solution leaching from the porous body. CONSTITUTION:A solution 6 is leached uniformly to the external surface 5g of a porous body 5f set up at the lower end section of the solution coater 5 through an infinite number of fine through-holes 5h, and the uniformly leaching solution 6 is brought into contact with an object and the object is coated. The quantity of leaching of the solution 6 leaching to the external surface of the porous body 5f and the presence of leaching operation are controlled on occasion by properly setting the pressure, quantity, etc., of a pressurization gas working to a syringe 5b, no isolated region, etc., are generated, and the object is coated equally with the solution 6.
申请公布号 JPH01208838(A) 申请公布日期 1989.08.22
申请号 JP19880032743 申请日期 1988.02.17
申请人 HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD 发明人 TODA NAOKI
分类号 B05C1/02;H01L21/52 主分类号 B05C1/02
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