发明名称 UNIT INTENDED TO RESTORE THE INITIAL CLEANNESS CONDITIONS IN A QUARTZ TUBE USED AS REACTION CHAMBER FOR FABRICATING INTEGRATED CIRCUITS
摘要 PCT No. PCT/FR86/00069 Sec. 371 Date Oct. 30, 1986 Sec. 102(e) Date Oct. 30, 1986 PCT Filed Mar. 4, 1986 PCT Pub. No. WO86/05129 PCT Pub. Date Sep. 12, 1986.A vertical panel (1) separates the shop into an average cleanness zone (2) and a maximum cleanness zone (3). An elongated tank (4) is located in the zone (2) and an enclosure (6) is inserted in an opening (5) in the panel (1). The tubes are cleaned and prerinsed in the tank (4), then rinsed and dried in the enclosure (6), which also serves as a lock for the transfer of the tubes between the zones (2) and (3).
申请公布号 DE3664264(D1) 申请公布日期 1989.08.17
申请号 DE19863664264 申请日期 1986.03.04
申请人 LAMI, PHILIPPE 发明人 LAMI, PHILIPPE
分类号 B08B3/10;B08B15/00;C03B20/00;F24F3/16;F24F7/06;H01L21/22;H01L21/304;(IPC1-7):B08B15/00 主分类号 B08B3/10
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