| 发明名称 |
ION IMPLANTING METHOD |
| 摘要 |
|
| 申请公布号 |
JPH01204413(A) |
申请公布日期 |
1989.08.17 |
| 申请号 |
JP19880027590 |
申请日期 |
1988.02.10 |
| 申请人 |
MATSUSHITA ELECTRON CORP |
发明人 |
YOSHIDA MASAKATSU |
| 分类号 |
H01L21/266;H01L21/265 |
主分类号 |
H01L21/266 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
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