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发明名称
SURFACE TREATING APPARATUS
摘要
申请公布号
JPH01204423(A)
申请公布日期
1989.08.17
申请号
JP19880027716
申请日期
1988.02.10
申请人
HITACHI LTD;HITACHI HARAMACHI SEMICONDUCTOR LTD
发明人
IWABUCHI KATSUHIRO;MIMURA AKIO;OIKAWA SABURO;KONISHI NOBUTAKE
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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