发明名称 |
Semiconductor wafer transfer apparatus with back-to-back positioning and separation |
摘要 |
An apparatus is disclosed for the bulk transfer of semiconductor wafers from container to container for processing in the back-to-back configuration. The apparatus includes a stage (12) for selectively raising the wafers from a boat (14) upward into a retaining mechanism (18). The wafers are confined in a back-to-back configuration through a slot (64) in the end of a back-to-back retainer (34). The back-to-back configured wafers are then removed, processed and then disposed back in the retaining mechanism (18). The back-to-back wafers are aligned with an alignment slot (76) in a preseparation retainer (36). The preseparation retainer (36) provides both alignment and a slight preseparation with respect to a separation retainer (38). The separation retainer (38) has a separation edge (118) which separates the back-to-back configured wafers into slots (104) and (108). The wafers are then removed after separation thereof.
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申请公布号 |
US4856957(A) |
申请公布日期 |
1989.08.15 |
申请号 |
US19880142439 |
申请日期 |
1988.01.11 |
申请人 |
MACTRONIX, INC. |
发明人 |
LAU, JOHN J.;FANG, SI-MING |
分类号 |
H01L21/677 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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