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发明名称
Ohmic contacts for semiconductor devices and method for forming ohmic contacts
摘要
申请公布号
US4853346(A)
申请公布日期
1989.08.01
申请号
US19870140072
申请日期
1987.12.31
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
BAKER, JOHN M.;CALLEGARI, ALESSANDRO C.;LACEY, DIANNE L.;SHIH, YIH-CHENG
分类号
H01L21/28;H01L21/285;H01L29/43;H01L29/45
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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