发明名称 THIN FILM RESISTOR
摘要 <p>PURPOSE:To slightly vary the resistance value of a thin film resistor and to accurately trim it in a short time by trimming it from the end which is the nearest to an electrode wiring layer of a trimming land in a direction of obliquely cutting the land. CONSTITUTION:A thin film resistor 1 having a trimming land 11 and an electrode wiring layer 2 adhered to the part of the resistor 1 are provided, an the resistor 1 is trimmed from the end which is the nearest to the layer 2 of the land 11 in a direction of obliquely cutting the land 11. For example, a voltage applied to both the ends of the original resistor 1 is measured while continuously supplying a constant current from a constant-current source 3 to the resistor 1. Then, the land 11 of the resistor 1 is cut by a laser beam. In this case, the resistor 1 is cut from the end which is the nearest to the layer 2 of the land 11 in a direction of the cutting oblique to the direction of a current. When the read of a voltmeter becomes a value to be obtained, the trimming is finished.</p>
申请公布号 JPH01187902(A) 申请公布日期 1989.07.27
申请号 JP19880012967 申请日期 1988.01.22
申请人 MATSUSHITA ELECTRON CORP 发明人 MORIOKA JUNKO
分类号 H01C17/24;H01C7/00;H01L21/822;H01L27/01;H01L27/04 主分类号 H01C17/24
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