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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH01187867(A)
申请公布日期
1989.07.27
申请号
JP19880011726
申请日期
1988.01.21
申请人
NIKON CORP
发明人
NISHIDA HIROSHI
分类号
H01L29/73;H01L21/331;H01L21/74;H01L21/8228;H01L27/08;H01L27/082;H01L29/72;H01L29/732
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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